Displacement sensor


A sensor for measuring displacement.

Typical conventional displacement sensors are the capaci-tance gauges and the differential transformers, and their resolution is about 0.01 μm. In atomic force microscopes (AFM), displacement of stylus is measured by optical lever method. Conventional displacement sensors, with their limited spatial resolution and excess load applied to the object by stylus, are not always applicable for micromachine-related purposes where the objective items are very small. Some types of displacement sensors that use laser beam have a measurement spot of the μm range.


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