Diffusion gauge


A strain gauge that utilizes the piezoresistance effect by diffusing impurities in silicon substrate.

A p-type (or n-type) diffusion layer is formed on the n-type (or p-type) silicon substrate to produce the piezoresistance effect. This chip can be used as a strain gauge. A diffusion gauge is smaller and more sensitive than a resistance wire gauge. And it is possible to make a very small pressure sensor by integrating it onto a silicon diaphragm. The output from diffusion gauge has temperature dependency like reistance wire type gauge, therefore it is needed to be compensated.


[Related Terms]
Pressure sensor, Micromachining (1)