A strain gauge that utilizes the piezoresistance effect by diffusing
impurities in silicon substrate.
A p-type (or n-type) diffusion layer is formed on the n-type (or
p-type) silicon substrate to produce the piezoresistance effect. This chip can be used as a strain
gauge. A diffusion gauge is smaller and more sensitive than a resistance wire gauge. And it is
possible to make a very small pressure sensor by integrating it onto a silicon diaphragm. The
output from diffusion gauge has temperature dependency like reistance wire type gauge, therefore it
is needed to be compensated.
Pressure sensor, Micromachining (1)