A flexible membrane structure that separates space.
In a microscopic region, materials such as single crystal silicon, polysilicon,
and so on are used for the diaphragm structure. The structure is commonly
fabricated by anisotropic etching. The thickness of the structure can be
controlled from several micrometers to several tens of micrometers depending
on the application. The structure can be used to detect pressure changes,
or cause displacement. For example, it is used in the pressure sensitive
part of a pressure sensor for automobile engines. Also, it is used as a
membrane to change pressure in microvalves and micropumps.
Microvalve, Micropump, Pressure sensor