A processing technology that forms a structure of desired geometry,
dimensions, and surface conditions by concentrating or limiting chemical dissolution in a specific
region on the surface of a material.
To concentrate or limit chemical dissolution, the area not to be
processed is covered in advance in a desired pattern with an anti-corrosion substance called the
maskant or resist. This process called masking uses either the photoresist, a photosensitive
anti-corrosion material, or a nonphoto-sensitive anti-corrosion material. Use of nonphotosensitive
anti-corrosion material is called the chemical milling, because its shaping process is similar to
that of mechanical milling.