Capacitive displacement meter0303201-22
A device for measuring displacement based on the capacitance.
The capacitive displacement meter is used in various fields because
displacement can be measured at high resolution without contact. In the micromachine field, it
measures and evaluates the microscopic displacement of various types of actuators and, for example,
is used for measuring the shapes of various small prototypes.
Pressure sensor, Micromachining (1)