A machining process using high-density energy beams.
High-density energy beams used in micromachining include laser
beams, electron beams, ion beams (a typical ion beam is a focused ion beam, i.e. FIB), and molecular
or atomic beams. Micromachining based on laser beams is either performed through a micro-pattern
mask or uses a focused laser beam. In the case of the mask method, the machining accuracy is
determined by the accuracy of the mask and aberration of the lens. In the case of a focused laser
beam, the machining accuracy is determined by the wavelength of the laser beam and the focal length
of the lens. Ion beam processing is used in finishing acute profiles.