Aspect ratio


The ratio of the vertical dimension (height) to the horizontal dimension (width) of a three-dimensional structure, used as an index to the relative thickness of the structure.

It is accepted that silicon process is not appropriate to form three-dimensional structures of much depth, because it is difficult to manufactur structures of an aspect ratio over 10:1. By the use of anisotropic etching or LIGA process, deep holes, grooves and so on of an aspect ratio of 100:1 or greater can be obtained.


[Related Terms]
LIGA process