microscope that measures microscopic geometry by monitoring the displacement of a cantilever caused by the atomic force between the cantilever tip and the specimen while scanning the cantilever in a raster pattern.(IEC/2015)
The optical lever method is useful for monitoring the displacement of the cantilever. The displacement of the cantilever is measured by detecting the reflected light from the cantilever. There are three types of cantilever movement in the measurements: 1) the method wherein the cantilever contacts the specimen, 2) the method that monitors the amplitude change of the vibrating cantilever with cyclic contact (tapping mode), 3) the method that monitors the frequency change of the vibrating cantilever without contact between the cantilever and the specimen.