A sensor for measuring acceleration.
This accelerometer, based on silicon micromachining technology, is typically composed of a soft
spring and a mass. The accelerometer senses the displacement of the spring caused by the inertia of
the accelerated mass, or detects acceleration from the measurement of the force required to cancel
this displacement. Among today's silicon-made sensors, accelerometers hold particular promise as a
next-generation product. There are many types of accelerometer such as semiconductor strain gauges,
capacitance detectors, electromagnetic servosystems, and electrostatic servosystems. In addition,
vibration detection-type accelerometers, which detect changes in resonance frequencies, and
piezoelectric effect-type accelerometers, which use the piezoelectric effect, are also under
development. Continuing development is aimed at applications in a wide variety of fields, including
automobiles, robots, and the space industry.
Pressure sensor, Capacitive displacement meter, Integrated strain