Micromachine Center (MMC) is involved in various activities in order to establish technological basis of future Micromachine / MEMS devices, as well as to develop MEMS / Micromachine industries.

 Main activities of MMC are as follows.
National R & D Project
(1) Green Sensor Network System Project(2011-2014)
(2) BEANS Project(2008-2012)
(3) fineMEMS Project (2006-2008)
(4) MEMS-ONE Project (2004-2006)
(5) MEMS Project (2003~2005)
(6) Micromachine Technology Project (1991-2000)

National R & D Project

 Since 1992 MMC has been mainly involved in 6 national R&D projects, aimed to establish new technological basis in cooperation with companies, universities, national research institutes.
(1) Green Sensor Network System Project(2011-2014)
(2) BEANS Project(2008-2012)
(3) fineMEMS Project (2006-2008)
(4) MEMS-ONE Project (2004-2006)
(5) MEMS Project (2003~2005)
(6) Micromachine Technology Project (1991-2000)

 Moreover, these R&D projects are expected to contribute a great deal to further expansion of MEMS / Micromachine industries.

(1) Green Sensor Network System Project (2011-2014)

 Development of green MEMS sensors
Current and magnetic field (electrical energy), dust and gas (CO2 / VOC) concentration (air conditioning & ventilation), infrared array (human presence, motion & ambient temperature sensing)electric(al) generating and storage module
 Development of green sensor terminals
Sensors the size of band-aids (2 cm x 5 cm), mounted on flexible substrates; electrical generating module with indoor ambient lighting and its storage module; ultra-low power consumption analog energy management circuits; simultaneous multiple access (reception from 1000 terminals simultaneously) / high sensitivity receivers
 Development of green sensor network system
Construction of a network system in the laboratory and verification of energy-saving effect
【NEDO joint research project】
Purpose: To develop revolutionary new sensors that incorporate wireless communication functions, stand-alone power source functions and ultra-low power consumption functions (thereby resolving three issues common to all of the sensor devices used in sensor networks) and introduce sensor networks to demonstrate energy-saving effects, through visibility (environmental monitoring, determining energy consumption, etc.) and optimization (controlling energy consumption).

(2) BEANS Project (2008-2012)

 BEANS Project targets realization of New Life Style and implements establishment of fundamental process technologies for hetero-functional devices integrated with Nano and Bio-Organic technology.
Research & Development Themes
 ◆Bio/Organic Materials Integration Process
   >> Life BEANS Center at Univ. of Tokyo and Kyusyu Univ.
   ・Nano-scale Interfaces Treatment
   ・Bio/Organic Integrated Higher-Order Structure Formation
 ◆Novel fabrication technology for 3-D Nano-structures
   >> 3D BEANS Center at Univ. of Tokyo.
   ・Top-down fabrication of monolayer-flat, defect-free 3D structure
   ・Bottom-up technology for heterogeneous integration of materials and functions on 3-D platform
 ◆Large Area Continuous Process of Micro/Nano Structure
   >> Macro BEANS Center at AIST.
   ・Non-vacuum large-area deposition techniques of high-quality nano/micro materials
   ・Continuous nano/micro -machining and integration Process for fiber substrates
Operation of BEANS Project
 ◆More than 110 researchers are dispatched to BEANS Lab or join the BEANS Project 16 companies, 8 universities, 1 national institute, and 2 organizations.
 ◆Combination of cutting-edge researchers from academia and a experienced management team from leading companies, outcomes of the project, to establish innovative process platforms of BEANS, could be maximized.
 ◆This unique scheme enables technology convergence by close and dense interaction between BEANS Centers and development of human resources who are indispensable for hetero-functional research and development.

(3) fineMEMS Project (2006-2008)


(4) MEMS-ONE Project (2004-2006)

Three-year MEMS-ONE project to develop integrated CAD system for MEMS aimed at improving efficiency of MEMS design process from 2004 to 2006. Both beginners and high end users of MEMS are anticipated to utilize MEMS-ONE system in manufacturing MEMS devices.


 The beta version of MemsONE had been released in June, 2007. At the same time, the MemsONE support center had been established, which is in charge of MemsONE version-up and supporting users after 2007. The first commercial version of MemsONE will be launched in April, 2008.

 MEemsONE has user-friendly interfaces. Plug-in solvers developed by third parties will be welcome. And commercial software can be connected easily with MemsONE through data file.

(5) MEMS Project (2003-2005)
 MEMS Project is strictly targeted to develop advanced MEMS devices. Participating companies are urged to start foundry service of these advanced MEMS after finishing the project.

(6) Micromachine Technology Project (1991-2000)

 10 years Micromachine Technology Project ended in 2000 successfully with many technological results, which brought high capability of process and product innovation to participating companies. Outline of the project is shown below.
for more information on Micromachine Technology Project

MEMS Standardization

 MMC recognizes the importance of international standards of MEMS, and has been devoted to making an effort for IEC standardization. So far several drafts of standardization were submit to IEC as to terminology of micromachine technology, test methods of MEMS thin film material and so on. Original terminology data file can be accessed in this web.

 Micromachine Center became a mirror committee for IEC WG that lead the international standardization efforts on MEMS area in Japan. As a part of those activities, MEMS standardization roadmaps had been set and announced in April 2007. The roadmaps consists of two part. One is the road map on process and materials. The other is on devices for automobile application and information and communication technology application. Japan will continue its contribution on IEC acts as a key role of international MEMS standardization.


 Recently MMC initiated Japan-Korea-China Workshop on MEMS Standardization in order to exchange information and to survey future cooperative work on MEMS standardization. This workshop is decided to be held every year.


 with International Micromachine-Nanotech Symposium

 Exhibition MICROMACHINE targeted MEMS/micromachine business is held every year in Tokyo. The number of both attendance and exhibitor has been growing at a rapid speed for these several years, and becomes one of the most promising exhibitions at this moment. The Exhibition MICROMACHINE is the best exhibition which offers,
1) Opportunity for introducing your latest technology & products to the wide range of prospective customers.
2) Chance to get feedbacks from your potential buyers.
3) Place of multidisciplinary exchange.
4) Occasion to collect the latest market demands and trends.
more information on Exhibition MICROMACHINE

 International Micromachine-nanotech Symposium is also held every year together with Exhibition MICROMACHINE. The symposium aims to contribute to the advancement of Micromachine technology by referring to the latest technological information as well as the direction of the technological movement that brought here by foreign and domestic experts who are studying forefront technologies in micro/nano field.
more information on the symposium

MEMS Market in Japan
 MMC estimated MEMS Market Volume in 2010, 2015 and 2020 expectations in Japan.You can get marketing data by the estimation.

[Current MEMS Market in Japan]
 The MEMS Market in 2010 is 720 billion yen.

 Large Volume Sectors are Automotive(260B yen), Information Processing and Telecommunication Equipment(215B yen), and Precision Equipment(46B yen). Those fields are strong industry in Japan. Their scale reflects the results of Japanese industry's pioneering efforts in MEMS development, application, and use to achieve product differentiation.

 Sectors Need to be Developed Further are Biotechnology, Medical/Social services and Society & Culture. Those fields represent attractive markets expected to be high growth markets in response to future changes in society.

[Market Predictions in 2020 in Japan]
 Estimated Market Volume will be 3.1 trillion yen in 2020.

 Large Volume Sectors are Information and communications equipment, Automotive Society and Precision Equipment. The MEMS market in these areas will expand and grow steadily. Development of low-cost MEMS sensors and RF MEMS enables significant growth in the society and culture sector because MEMS devices have been adopted in large numbers both in information-enabled home appliances and amusement products.


MEMS Industry Forum Japan

 In order to accelerate MEMS industry, which has been carried out the takeoff start. development, MEMS Industry Forum (MIF) Japan was launched in April, 2006. The various policies that back up MEMS industrialization are still required to get steady growth of the industry.

 Major activities of MEMS Industry Forum Japan are as follows.
1) Proposing policies of the MEMS industry development to the government and agencies
2) Establishing and implementing projects of industry and academic cooperation
3) Improvement of MEMS infrastructure projects for supporting industry development
   - MEMS foundry network
   - Supporting MemsONE
   - Networking with foundries and clusters
   - Education
4) Supporting an increase in exchange of businesses information


International Affiliate Organizations  as of March 1, 2012
Organization Country Link
iVAM Germany URL: http://www.ivam.de/index.php?clear=2
MANCEF USA URL: http://www.mancef.org/
MIG USA URL: http://www.memsindustrygroup.org/
NEXUS Switzerland URL: http://nexus-mems.com/
MNTNetwork UK URL: http://www.mntnetwork.com/
Fraunhofer ENAS Germany URL: http://www.enas.fraunhofer.de/en.html
UC Berkley, BSAC USA URL: http://www-bsac.eecs.berkeley.edu/
U of Michigan, WIMS USA URL: http://www.wimserc.org/
IMEC Belgie URL: http://www.imec.be/ovinter/static_general/start_en.shtml
SSTT China URL: http://www.sstt.org.cn/
SIMTech Singapore URL: http://www.simtech.a-star.edu.sg/simcorp/index.do
SUFRAMA Brazil URL: http://www.suframa.gov.br/eng/modelozfm_zfm_EN.cfm
IME Singapore URL: http://www.ime.a-star.edu.sg/
NTRA Korea URL: https://www.nanokorea.net/eng/
VTT Finland URL: http://www.vtt.fi/?lang=en
NNMC USA URL: http://nationalnano.info/aboutus.aspx
CEA-LETI France URL: http://www-leti.cea.fr/
ACAMP Canada   URL: http://acamp.ca/
ITRI South Taiwan   URL: http://www.itri.org.tw/eng/
Russian MEMS Association  Russia    URL: http://www.mems-russia.com/

IVAM http://www.ivam.de/
Interessengemeinschaft zur Verbreitung von Anwendungen der

IVAM is an international association of companies and institutes in the field of microtechnology.

IVAM is the communicative bridge between suppliers and users of microtechnology products and services. At present 165 companies and institutes from eight European countries, Korea, Japan and the United States are IVAM members.

IVAM Objectives

  • to bring innovations to market and create competitive advantages
    via technology marketing.
  • to work international markets and provide worldwide networking.
  • to provide lobbying services for small and medium-sized enterprises
    in the high-tech sector.

MANCEF http://www.mancef.org/

MANCEF was incorporated in December 2000 as a not-for-profit organization in Florida, USA.

MANCEF Objectives

  • To promote the exchange of knowledge and disseminate information that can accelerate the emergence of an effective economic basis for the future development of Micro and Nano-technology based industries
  • To produce conferences, educational training sessions, international trade shows, seminars and internet-based electronic forums focusing on Micro and Nanotechnology, including commercial and educational opportunities utilizing such technology
  • To solicit proposals that will promote the commercialization of Micro, Nano and other small emergent technologies
MEMS Industry Group in U.S.A.

The MEMS Industry Group (MIG) is the premier trade association representing the MEMS and Microstructure industries. MIG's goal is to:

  • enable the exchange of non-proprietary information among members
  • provide reliable industry data that furthers the development of technology
  • work with various groups to bring about the greater commercial development and use of MEMS and MEMS-enabled products

MIG strives to be the unifying voice of the commercial MEMS industry.

Mission Statement

MIG strives to be the unifying voice of the commercial MEMS industry. Our mission is to try to understand and to eliminate the barriers that prevent the greater commercial use of MEMS and MEMS-enabled technology.

In support of this mission, MIG provides its members with benefits and information previously unavailable to the industry. In addition to the annual Industry Report, members have access to the latest MIG-generated industry research and statistics on employment, revenue and markets. Linked together via the MIG Web site, members have instant, global visibility as thousands of unique customers, researchers, media and policymakers per month visit the site for information, industry news and trends.

Additionally, MIG provides two unique annual industry events: METRIC and the MEMS Executive Congress.  These events offer the opportunity to engage with peers in the MEMS industry in meaningful dialogue about technology and business, and how to harness both to move towards wider and more successful commercialization. 

National Nanotechnology Manufacturing Center (NNMC)

The US National Nanotechnology Manufacturing Center (NNMC) is a non-profit organization dedicated to the development of a robust, sustainable nanomanufacturing infrastructure by leveraging existing manufacturing capabilities and supporting the creating of new capabilities when necessary. In the US, it is nationally-recognized as the valued resource for the commercialization and manufacture of nanotechnology, and development of industry standards and workplace safety procedures. The NNMC currently has a major focus in nanolithography utilizing a wide range of sophisticated developmental instruments and test hardware, including: a Nano-R2 atomic force microscope, PixDro and Dimatix industrial ink-jet printers, NanoInk NSCRIPTOR Enabling Dip Pen Nanolithography research platform, and a 2-camera, single laser, full-motion image quality measurement system.

Russian MEMS Association (RAMEMS)
Russian MEMS Association was founded in June 2010. It is the leading organization in Russia, which specializes in microsystems only. 

RAMEMS was created as a body which was aimed to support MEMS business in Russia and develop the relationship with foreign partners.
RAMEMS promotes MEMS tendency by making e-newsletters, holding MEMS Forums, which are considered to be the main industry events in Russia, developing international cooperation between MEMS research centers, manufacturers and users, commercializing our partners’ technologies, creating an effective informational field aimed at revitalizing Russian companies output and development, and contributing to new jobs and and wealth .

The bridge function between foreign and Russian partners is still a core aspect of the company, and RAMEMS has continuously adapted its great experience gained from effective cooperation with MEMS-leading organizations all over the world to the needs of the domestic MEMS industry.

Now RAMEMS offers various technologies, products and trainings for all steps of MEMS-components and systems production, from market research and component modeling to making a turn-key solution.

 MNOIC(MicroNano Open Innovation Center) offers the technical support for research and development of MEMS, Metal Mold and Wafer/Chip MEMS packaging utilizing a worldwide-level state-of-the-art 8 and 12 inches MEMS facility.
MNOIC is established in 2011, as a part of an activity of MIF (MEMS Industrial Forum), Micromachine Center. Collaborating with UMEMSME(Research Center for Ubiquitous MEMS and Micro Engineering) in AIST (Advanced Industrial Science and Technology) JAPAN, and Utilizing the 8/12 inches MEMS facility at TIA [TKB812]. MNOIC offers the engineering expertise and skills to support industrial development
My Lab offer the R&D environment utilizing 8/12 inches MNOIC utility, equipment and office.
 ◆Customer can use the 8/12 inches state-of-the-art facilities during 1 year- or 6 months-term with special discount.
 ◆After evaluation, customer can decide whether they purchase these facilities in in-house or not.
 ◆Engineers can expand their human network.
 ◆Engineers can attend several MEMS engineering and MEMS based MOT seminars hosted by UMEMSME and MNOIC.
MY Fab offer the R&D equipment for the specific subject to the prototyping and evaluating.
 ◆Customer can use the facilities with one-time bases.
 ◆After the detailed investigation, customer can decide whether they introduce new equipment in in-house factory or not.
 ◆MNOIC also offers the operation of equipment for the small and start-up business.
 ◆MNOIC supports the introduction of affiliated MEMS foundry company for the production of MEMS.
Training of Engineers
 “MOT seminars”  
 “New marketing seminars”
 “MEMS technology seminars”
 “MemsONE design & simulation tool"
Exhibition Micromachine Micromachine Summit Micromachine & Nanotech Symposium