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| 1. Systematization Technology | |
| 2. Functional Device Technology | |
| 3. Basic Technology |
| 1. Systematization Technology | |
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| In-pipe Wireless Micromachine | |
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| Micro Unit Machine for Experimental Chain-type Micromachine System |
Verification of Algorithms for Pattern Forming |
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| 2. Functional Device Technology |
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| Micro Laser Welding Device |
Laser Scanner with a Photo-Current Generator |
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| Fluid Dispenser for Microfactory |
Micro Scanning Sensor |
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| 3. Basic Technology |
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| High Precision Micromachining |
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| X-ray Lithography |
Micro Electrochemical Machining |
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